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Low Dielectric Constant Materials for IC Applications

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Low Dielectric Constant Materials for IC Applications - Ho, Paul S. (Editor), and Leu, Jihperng (Editor), and Lee, Wei William (Editor)

Low dielectric constant materials are an important component of microelectronic devices. This comprehensive book covers the latest low-dielectric-constant (low-k) materials technology, thin film materials characterization, integration and reliability for back-end interconnects and packaging applications in microelectronics. Highly informative ...

Low Dielectric Constant Materials for IC Applications 2012, Springer-Verlag Berlin and Heidelberg GmbH & Co. K, Berlin

ISBN-13: 9783642632211

Paperback

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Low Dielectric Constant Materials for IC Applications 2002, Springer, Berlin, Germany

ISBN-13: 9783540678199

2003 edition

Hardcover

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