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Low Dielectric Constant Materials for IC Applications

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Low dielectric constant materials are an important component of microelectronic devices. This comprehensive book covers the latest low-dielectric-constant (low-k) materials technology, thin film materials characterization, integration and reliability for back-end interconnects and packaging applications in microelectronics. Highly informative contributions from leading academic and industrial laboratories provide comprehensive information about materials technologies ...

Low Dielectric Constant Materials for IC Applications 2012, Springer-Verlag Berlin and Heidelberg GmbH & Co. K, Berlin

ISBN-13: 9783642632211

Paperback

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Low Dielectric Constant Materials for IC Applications 2002, Springer, Berlin, Germany

ISBN-13: 9783540678199

2003 edition

Hardcover

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